Process Purpose: Cleaning raw silicon wafers and fabricating light-trapping textured surfaces

Monocrystalline Batch Texturing Equipment

Supplier choice: Changzhou JJG.,etc

Example Model: SC-CSZ10000E-20F
Process Purpose: To form the PN junction required for solar cell fabrication.

Low-Pressure Soft-Landing Closed-Tube Diffusion System

Supplier choice: Beijing NAURA Microelectronics.,etc

Example Model: HORIS D12542P
Process Purpose: Remove backside PSG (Phosphosilicate Glass) and create a polished surface on the rear side.

Single-Side PSG Removal Equipment

Supplier choice: Changzhou JJG Precision.,etc

Example Model: SC-LSS7500CS
Process Purpose: To achieve anti-PID (Potential Induced Degradation) performance.

Tube Diffusion Oxidation Annealing Furnace

Supplier choice: Shenzhen S.C New Energy.,etc

Example Model: (DOA-420)(Oxidation furnace,6 tubes)
Process Purpose: Deposit an Al₂O₃/SiNx passivation stack on the silicon wafer rear side to reduce surface recombination velocity and enhance secondary reflection.

Tube Plasma Aluminum Oxide Deposition Furnace

Supplier choice: Shenzhen S.C New Energy.,etc

Example Model: (PD-520)(Rear surface, 5 tubes)
Process Purpose: Fabrication of anti-reflection coating (ARC) on solar cell

Tube Plasma Deposition Furnace

Supplier choice: Shenzhen S.C New Energy.,etc

Example Model: (PD-520)(Front surface,10 tubes)
Process Purpose: Laser ablation of backside dielectric stack to form localized back surface field (LBSF) contacts for current collection.

Laser Grooving Equipment

Supplier choice: Wuhan DR Laser Technology.,etc

Example Model: DR-M2XS-AL-DY90
Process Purpose: Formation of front & rear surface electric fields and electrodes for current collection and extraction, while providing soldering points for inter-cell series connection.

Dual-Track Screen Printing Line

Supplier choice: Suzhou Maxwell.,etc

Example Model: MX-XDL-DP
Process Purpose: Formation of optimal ohmic contacts at electrodes while passivating silicon surface and bulk defects through hydrogenation.

Dual-Track Firing Furnace

Supplier choice: Suzhou Maxwell.,etc

Example Model: MX-XDL-OVEN- D+P II-II
Process Purpose: Sorting and screening of solar cells based on efficiency, appearance, and electroluminescence (EL) characteristics.

Dual-Track Testing & Sorting

Supplier choice: Suzhou Maxwell.,etc

Example Model: MX-XDL-TEXT
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