Process Purpose： Cleaning raw silicon wafers and fabricating light-trapping textured surfaces
Equipment brand: Changzhou JJG
Manufactured date: 2021/8/1
Model: SC-CSZ10000E-20F
Process Purpose: To form the PN junction required for solar cell fabrication.
Equipment brand: Beijing NAURA Microelectronics
Manufactured date: 2021/8/1
Model: HORIS D12542P
Process Purpose: Remove backside PSG (Phosphosilicate Glass) and create a polished surface on the rear side.
Equipment brand: Changzhou JJG Precision
Manufactured date: 2021/8/1
Model: SC-LSS7500CS
Process Purpose: To achieve anti-PID (Potential Induced Degradation) performance.
Equipment brand: Shenzhen S.C New Energy
Manufactured date: 2021/8/1
Model: （DOA-420）（Oxidation furnace，6 tubes）
Process Purpose: Deposit an Al₂O₃/SiNx passivation stack on the silicon wafer rear side to reduce surface recombination velocity and enhance secondary reflection.
Equipment brand: Shenzhen S.C New Energy
Manufactured date: 2021/8/1
Model: （PD-520）（Rear surface, 5 tubes）
Process Purpose: Fabrication of anti-reflection coating (ARC) on solar cell
Equipment brand: Shenzhen S.C New Energy
Manufactured date: 2021/8/1
Model: （PD-520）（Front surface，10 tubes）
Process Purpose: Laser ablation of backside dielectric stack to form localized back surface field (LBSF) contacts for current collection.
Equipment brand: Wuhan DR Laser Technology
Manufactured date: 2021/8/1
Model: DR-M2XS-AL-DY90
Process Purpose: Formation of front & rear surface electric fields and electrodes for current collection and extraction, while providing soldering points for inter-cell series connection.
Equipment brand: Suzhou Maxwell
Manufactured date: 2021/8/1
Model: MX-XDL-DP
Process Purpose: Formation of optimal ohmic contacts at electrodes while passivating silicon surface and bulk defects through hydrogenation.
Equipment brand: Suzhou Maxwell
Manufactured date: 2021/8/1
Model: MX-XDL-OVEN- D+P II-II
Process Purpose: Sorting and screening of solar cells based on efficiency, appearance, and electroluminescence (EL) characteristics.
Equipment brand: Suzhou Maxwell
Manufactured date: 2021/8/1
Model: MX-XDL-TEXT
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